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ݵü ǿ ȯմϴ.

      Ѿб ݵü 1992 Ź  Ʒ źϿ 3      Ȯ β Ҽ     (Atomic layer deposition) ̿Ͽ ޸ , ÷, ¾ ̿Ǵ     ݵü   ׸ ڿ ߻Ǵ м      ̷ ٽ   ǥ ϰ ֽϴ.

 

  2018/03/06  []   14 Korean ALD workshop ȳ.

  2017/05/15  []   13 Korean ALD workshop ȳ.

  2016/04/20  []   12 Korean ALD workshop ȳ.

  2015/03/05  []   11 Korean ALD workshop ȳ.

   2014/03/25  []   10 Korean ALD workshop ȳ. 

  2012/03/31  []   8 Korean ALD workshop ȳ. 

  2009/04/27  []  5th KALD ε Ϸ. 

  2008/06/03  []  4th KALD ε Ϸ߽ϴ. 

  2008/03/11  []  Gallery Ϸ߽ϴ. 
  2007/04/20  []  Korea ALD 2007 Դϴ. 
  2007/03/21  []  ڷḦ ãô е鲲... 

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 High-K Dielectrics

 Metal Gate

 

 

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Photo Voltaic

 

 

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Flexible Display

OLED

Oxide TFT

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Remote Plasma ALD

 

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Thermal ALD

 



 

 


 

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ݵü                             

Semicondoctor Material Laboratory

Material Science Engineering, Hanyang University

 

   սʸ222 żа 516ȣ

   Devision Of Material Science & Engineering

   College Of Engineering, Hanyang Univiersity

   222 Wangsibri-ro, Seongdong-Ku, Seoul 133-791, Korea

      Tel)+82-2-2220-0387    Fax)+82-2-2220-3523